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2. Planarization of topography with spin-on-carbon hard mask;Noya;Proc. SPIE,2016
3. Novel Spin on Planarization Technology by Photo Curing SOC (P-SOC)
4. Self planarization performance of carbon-based spin-on hardmask;Yun;Proc. SPIE,2017
5. High temperature spin on carbon materials with excellent planarization and chemical vapor deposition compatibility;Zhang;Proc. SPIE,2019