Research on data augmentation for lithography hotspot detection using deep learning-Reference-Cited by-同舟云学术

Research on data augmentation for lithography hotspot detection using deep learning

Published:2018-09-19 Issue: Volume: Page:
ISSN:
Container-title:34th European Mask and Lithography Conference
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Author:

Borisov Vadim,Scheible Jürgen

Publisher

SPIE

Reference13 articles.

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2. Cnn based lithography hotspot detection.;Shin;International Journal of Fuzzy Logic and Intelligent Systems 2016,2016

3. Lithography hotspot detection: From shallow to deep learning;Yang,2017

4. Layout hotspot detection with feature tensor generation and deep biased learning;Yang,2017

5. Accurate lithography hotspot detection using deep convolutional neural networks;Moojoon Shin;Journal of Micro/Nanolithography, MEMS, and MOEMS,2016

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