1. A study of ILT-based curvilinear SRAF with a constant width
2. A Study of Applying Mask Process Correction to Constant Width Curvilinear SRAFs;Zuo,2023
3. Structured assist features in inverse lithography;Granik,2023
4. ILT for HVM: history, present and future;Danping,2022
5. Inverse lithography technology: 30 years from concept to practical, full-chip reality;Linyong;J. Micro/Nanopattern. Mats. Metro,2021