Diffraction signature analysis methods for improving scatterometry precision
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SPIE
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry;Measurement Science and Technology;2020-07-13
2. Multiobjective optimization for target design in diffraction-based overlay metrology;Applied Optics;2020-03-18
3. Influence of incident illumination on optical scattering measurement of typical photoresist nanostructure;Acta Physica Sinica;2020
4. Probing optimal measurement configuration for optical scatterometry by the multi-objective genetic algorithm;Measurement Science and Technology;2018-03-14
5. Generalized measurement configuration optimization for accurate reconstruction of periodic nanostructures using optical scatterometry;SPIE Proceedings;2016-03-08
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