High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry
Author:
Affiliation:
1. University of Arizona, College of Optical Sciences, 1630 East University Boulevard, Tucson, Arizona 85721, United States
2. Brookhaven National Laboratory, NSLS II 50 Rutherford Drive, Upton, New York 11973-5000, United States
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference29 articles.
1. Breaking the 10 nm barrier in hard-X-ray focusing
2. Current status of the NSLS-II optical metrology laboratory
3. Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms
4. Deflectometry challenges interferometry: the competition gets tougher!
5. Design Of A Long Trace Surface Profiler
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