Fabrication of microhole arrays on coated silica sheet using femtosecond laser-Reference-Cited by-同舟云学术

Fabrication of microhole arrays on coated silica sheet using femtosecond laser

Published:2016-10-14 Issue:10 Volume:55 Page:105101
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Wang Zhuping¹,Feng Guoying¹,Han Jinghua¹,Wang Shutong¹,Hu Ruifeng¹,Li Guang¹,Dai Shenyu¹,Zhou Shouhuan²

Affiliation:

1. Sichuan University, Institute of Laser and Micro/Nano Engineering, College of Electronics and Information Engineering, No. 24 South Section 1, Yihuan Road, Chengdu, Sichuan 610065, China

2. Sichuan University, Institute of Laser and Micro/Nano Engineering, College of Electronics and Information Engineering, No. 24 South Section 1, Yihuan Road, Chengdu, Sichuan 610065, ChinabNorth China Research Institute of Electro-Optics, No. 4 Jiuxianqiao Street, Chaoyang District, Beijing 100015, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference37 articles.

1. Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

2. State of the Art of Micromachining

3. A study on the quality micro-hole machining of tungsten carbide by micro-EDM process using transistor and RC-type pulse generator

4. Precision glass machining, drilling and profile cutting by short pulse lasers

5. Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining

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