1. Throughput enhancement for MAPPER mask less lithography;Wieland,2010
2. MAPPER: Progress toward a High Volume Manufacturing System;de Boer,2013
3. Higgins et al., JJAP. 50, 36504-1-8 (2011)
4. IMAGINE: an open consortium to boost maskless lithography takeoff. First assessment results on MAPPER technology;Pain,2011
5. Ultimate lithographic performances of advanced resists CAR or non-CAR resist?;Van Steenbergen,2012