Positive-tone EUV resists: complexes of platinum and palladium-Reference-Cited by-同舟云学术

Positive-tone EUV resists: complexes of platinum and palladium

Published:2015-03-19 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Sortland Miriam,Del Re Ryan,Passarelli James,Hotalen Jodi,Vockenhuber Michaela,Ekinci Yasin,Neisser Mark,Freedman Daniel,Brainard Robert L.

Publisher

SPIE

Reference15 articles.

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