EUV source collector-Reference-Cited by-同舟云学术

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EUV source collector

Published:2006-03-10 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Böwering Norbert R.,Ershov Alex I.,Marx William F.,Khodykin Oleh V.,Hansson Björn A. M.,Vargas L. Ernesto,Chavez Juan A.,Fomenkov Igor V.,Myers David W.,Brandt David C.

Publisher

SPIE

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. On the compatibility of free-electron lasers with EUV scanners;Optical and EUV Nanolithography XXXVII;2024-04-10

2. Extreme ultraviolet metalens by vacuum guiding;Science;2023-04-07

3. Non-axisymmetric droplet irradiation effects on ion and extreme ultraviolet light emission of laser-produced plasma light sources;Journal of Applied Physics;2021-06-21

4. Effect of Different Substrate Materials on Focusing Beam Performance of EUV Collector;Laser & Optoelectronics Progress;2020

5. Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source;Review of Scientific Instruments;2016-10

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