Effect of Different Substrate Materials on Focusing Beam Performance of EUV Collector
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Published:2020
Issue:17
Volume:57
Page:173401
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Xie Wanlu 谢婉露,Wu Xiaobin 吴晓斌,Wang Kuibo 王魁波,Luo Yan 罗艳,Wang Yu 王宇
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics