Affiliation:
1. GLOBALFOUNDRIES Dresden, Dresden, Saxony
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Special Section Guest Editorial: Control of Integrated Circuit Patterning Variance, Part 5: Pattern Placement, Critical Dimension, and Edge-to-Edge Overlay;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-12-21
2. Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-10-19
3. Efficient metrology for edge placement error and process window characterization using design for inspection methodology;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-10-19
4. Can remote SEM contours be used to match various SEM tools in fabs?;Metrology, Inspection, and Process Control XXXVII;2023-04-27
5. Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-11-04