Model improvements to simulate charging in scanning electron microscope-Reference-Cited by-同舟云学术

Model improvements to simulate charging in scanning electron microscope

Published:2019-12-05 Issue:04 Volume:18 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Arat Kerim T.¹,Klimpel Thomas²,Hagen Cornelis W.¹

Affiliation:

1. Delft University of Technology, Faculty of Applied Sciences, Delft

2. GenISys GmbH, Taufkirchen, Munich

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference55 articles.

1. A simulation of keV electron scatterings in a charged‐up specimen

2. Scanning electron microscope charging effect model for chromium/quartz photolithography masks

3. Does your SEM really tell the truth? How would you know? Part 4: Charging and its mitigation

4. Charging Effect of Specimen in Scanning Electron Microscopy

5. Study on Image Drift Induced by Charging during Observation by Scanning Electron Microscope

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Local voltage contrast changes in MOSFET using scanning electron microscopy with photoelectron beam technology;Metrology, Inspection, and Process Control XXXVIII;2024-04-10

2. On the uniqueness of a solution to the multiplicative control problem for the electron drift–diffusion model;Vestnik Udmurtskogo Universiteta. Matematika. Mekhanika. Komp'yuternye Nauki;2024-03

3. Reaction-diffusion effects and spatiotemporal oscillations under SEM, STM and AFM-assisted charging in fiber-like and wire-like systems: From molecular and quantum wires to cooperative ferroelectric nanofibers and microfibers;Materials Technology Reports;2023-11-27

4. Inverse Problems for the Diffusion–Drift Model of Charging of an Inhomogeneous Polar Dielectric;Computational Mathematics and Mathematical Physics;2023-09

5. Inverse Problems for the Diffusion–Drift Model of Charging of an Inhomogeneous Polar Dielectric;Журнал вычислительной математики и математической физики;2023-09-01