A simulation of keV electron scatterings in a charged‐up specimen-Reference-Cited by-同舟云学术

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A simulation of keV electron scatterings in a charged‐up specimen

Published:1988-01-15 Issue:2 Volume:63 Page:261-268
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Kotera M.,Suga H.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.340285

Reference19 articles.

Cited by 51 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Model improvements to simulate charging in scanning electron microscope;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-12-05

3. Model improvements to simulate charging in SEM;Metrology, Inspection, and Process Control for Microlithography XXXII;2018-03-13

4. Research on Electron Emission from Dielectric Materials by a Monte Carlo Method;Moscow University Physics Bulletin;2017-11

5. Monte Carlo Study on Electron Emission from Dielectric Materials;Journal of Computational and Theoretical Transport;2017-07-29

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