Si-photonics waveguides manufacturability using advanced RET solutions
Author:
Affiliation:
1. Mentor Graphics Corp. (France)
2. STMicroelectronics (France)
3. Mentor Graphics Corp. (United States)
Publisher
SPIE
Reference4 articles.
1. F. Boeuf et al. “A Multi-wavelength 3D-compatible Silicon Photonics Platform on 300mm SOI wafers for 25Gbits/s Applications”, 13.3.1-13.3.4, Proceedings IEDM 2013
2. Finding practical phenomenological models that include both photoresist behavior and etch process effects;Jung.,2015
3. Fast pixel-based mask optimization for inverse lithography
4. Extreme mask corrections: technology and benefits
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1. Mask synthesis for silicon photonics devices;Integrated Photonics Platforms II;2022-05-26
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