Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference13 articles.
1. Optical reference profilometry
2. Ultrahighly accurate 3D profilometer
3. High accuracy profile measurement of a machined surface by the combined method
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