Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist
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SPIE
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Vertical sidewalls in thick epoxy resists – a challenge for laser-based direct write lithography;Micro and Nano Engineering;2023-06
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