Author:
Zhao Qingliang,Sun Tao,Liang Ying-Chun,Dong Shen,Chen Mingjun
Cited by
3 articles.
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1. Nano-Scale Abrasion Studies of Materials Used in MEMS Devices and Packages;Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology;2005-01-01
2. Bibliography (1994–2004) of other topics;Modelling and Simulation in Materials Science and Engineering;2004-12-08
3. An Investigation on the 3D Micromachining Techniques Based on a SPM;Key Engineering Materials;2004-02