Estimation of mechanical stability of EUV pellicle by the collision of the particle defect

Author:

Kang Jiwon,Choi Wonyoung,Ko Heechang,Park Janggun,Kim Minwoo,Lee Junhyeong,Oh Hyekeun

Publisher

SPIE

Reference6 articles.

1. NXE pellicle: offering a EUV pellicle solution to the industry

2. Development of a novel closed EUV pellicle for EUVL manufacturing;Ono;Proc. SPIE,2016

3. Pellicle films supporting the ramp to HVM with EUV;van Zwol;Proc. SPIE,2017

4. Progress on EUV pellicle development

5. Lifetime estimation of extreme ultraviolet pellicle at 500W source power by thermal stress analysis;Park;Proc. SPIE,2017

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