Global optimization method based on ray tracing to achieve optimum figure error compensation
Author:
Affiliation:
1. Beijing Institute of Space Mechanics and Electricity (China)
2. China South Industry Academy (China)
Publisher
SPIE
Reference8 articles.
1. Compensator selection in the tolerancing of a microlithographic len;Williamson,1989
2. Improving lens performance through the most recent lens;Matsuyama,2003
3. Wavefront aberration compensation of projection lens using clocking lens elements
4. Automatic figure errors balancing method for catoptric and catadioptric lenses
5. Clocking-optimization method for figure-error balancing in complex optical systems
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