Author:
Lowney Jeremiah R.,Vladar Andras E.,Postek, Jr. Michael T.
Cited by
19 articles.
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1. Coming of Age in Computational SEM;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13
2. Simulating SEM imaging of via bottoms;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
3. Simulating HV-SEM imaging of HAR and buried features;Metrology, Inspection, and Process Control XXXVII;2023-04-27
4. Simulating process subtleties in SEM imaging;Metrology, Inspection, and Process Control XXXVI;2022-05-26
5. Contact inspection and resistance–capacitance measurement of Si nanowire with SEM voltage contrast;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-04-04