A study of the vertical walls and the surface roughness GaAs after the operation in the combined plasma etching
Author:
Affiliation:
1. Southern Federal Univ. (Russian Federation)
Publisher
SPIE
Reference16 articles.
1. Study of Electron Trap in Vapour Phase Epitaxial GaAs//;Mircea;J. Appl. Phys,1999
2. Photoca-pacitance. Measurements on Deep levels in GaAs under Hydrostatic Pressure//;White;Solid State Phys,1987
3. Ultrasonic attenuation inp‐type GaSb
4. physica status solidi (a)
5. Origin of the 0.82‐eV electron trap in GaAs and its annihilation by shallow donors
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures;International Conference on Micro- and Nano-Electronics 2018;2019-03-15
2. Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching;International Conference on Micro- and Nano-Electronics 2018;2019-03-15
3. Nanoscale profiling and memristor effect of ZnO thin films for RRAM and neuromorphic devices application;International Conference on Micro- and Nano-Electronics 2018;2019-03-15
4. Effect of substrate temperature on the properties of plasma deposited silicon oxide thin films;Journal of Physics: Conference Series;2018-12
5. Size effect on memristive properties of nanocrystalline ZnO film for resistive synaptic devices;Journal of Physics: Conference Series;2018-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3