Line-edge roughness in sub-0.18-μm resist patterns-Reference-Cited by-同舟云学术

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Line-edge roughness in sub-0.18-μm resist patterns

Published:1998-06-29 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Palmateer Susan C.,Cann Susan G.,Curtin Jane E.,Doran Scott P.,Eriksen Lynn M.,Forte Anthony R.,Kunz Roderick R.,Lyszczarz Theodore M.,Stern Margaret B.,Nelson-Thomas Carla M.

Publisher

SPIE

Cited by 98 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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