Author:
Braun Alexander,Zimmer Klaus-Peter
Cited by
5 articles.
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1. Performance Characterization of In-plane Electro-thermally Driven Linear Microactuators;Journal of Intelligent Material Systems and Structures;2006-10
2. Electro-thermally driven microgrippers for micro-electro-mechanical systems applications;Journal of Micro/Nanolithography, MEMS, and MOEMS;2005-04-01
3. Laser micromachining of the miniature functional mechanisms;Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education;2004-12-09
4. Diffractive gray scale masks for excimer laser ablation;Applied Surface Science;2002-01
5. Excimer Laser Machining for 3D-Surface Structuring;Photo-Excited Processes, Diagnostics and Applications