Author:
Ukraintsev Vladimir A.,Foucher Johann
Cited by
2 articles.
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1. High sensitivity tracking of CD-SEM performance: QSEM;SPIE Proceedings;2015-03-19
2. Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09