1. Some Issues in SEM-Based Metrology;Joy,1998
2. Inline e-beam metrology: The end of an era for image-based critical dimensional metrology? New life for defect metrology;Solecky,2013
3. Challenges of SEM metrology at sub-10 nm;Babin,2012
4. Sensitivity of scanning electron microscope width measurements to model assumptions
5. New apparent beam width artifact and measurement methodology for CDSEM resolution monitoring;Mayer,2003