1. DfM, the teenage years;Liebmann,2008
2. Taming the final frontier of optical lithography: design for sub-resolution patterning;Liebmann,2010
3. Marching to the beat of Moore’s Law;Borodovsky,2006
4. Reticle and wafer CD variation for different dummy pattern;Ning,2012
5. The complexity of fill at 28nm and beyond;Rodriguez,2012