EUV reflectivity and stability of tri-component Al-based multilayers-Reference-Cited by-同舟云学术

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EUV reflectivity and stability of tri-component Al-based multilayers

Published:2011-09-22 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Meltchakov E.,Ziani A.,Auchere F.,Zhang X.,Roulliay M.,De Rossi S.,Bourassin-Bouchet Ch.,Jérome A.,Bridou F.,Varniere F.,Delmotte F.

Publisher

SPIE

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Al/Zr-based multilayer mirrors with record-breaking reflectivity;Optics Letters;2024-08-08

2. Optical and structural performance of the Mo/Al (1.5wt. % Si) reflection multilayers at 58.4 nm;Optical Engineering;2024-07-03

3. Ultrasmooth Ti/Al multilayer with a Ti seed layer for EUV applications;Optical Materials Express;2024-06-06

4. Study of Optical Performance and Structure of Yb/Al (1.5 wt.% Si) and Yb/Al (Pure) Multilayers Designed for the 73.6 nm Range;Coatings;2024-05-23

5. Sc/SiC/Al Multilayer Optimization for Li K Spectroscopy;Applied Sciences;2024-01-23

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