1. Nanopatterning of diblock copolymer directed self-assembly lithography with wet development;Muramatsu,2011
2. Pattern scaling with directed self assembly through lithography and etch process integration;Rathsack,2012
3. Advances in directed self assembly integration and manufacturability at 300 mm;Rathsack,2013
4. High-Volume Manufacturing Equipment and Processing for Directed Self-Assembly Applications;Somervell,2014
5. Driving DSA into Volume Manufacturing;Somervell,2015