Accurate measurements at interferometric ellipsometer
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference14 articles.
1. R. M. A. Azzam and N. M. Bashara ,Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977).
2. Derivation of retardation phase in computer-aided photoelasticity by using carrier fringe phase shifting
3. Rotating-polarizer polarimeter for accurate retardance measurement
4. Phase-shifting interferometer/ellipsometer capable of measuring the complex index of refraction and the surface profile of a test surface
5. Common path interferometric microellipsometry
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3. Characterization of beam splitters in the calibration of a six-channel Stokes polarimeter;Journal of Optics;2018-11-22
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