Effect of nonpolarizing beam splitter on measurement error in heterodyne interferometric ellipsometers
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/23/i=8/a=085204/pdf
Reference24 articles.
1. Balanced detector interferometric ellipsometer
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4. Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster
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