Author:
Sun Wei,Sohda Yasunari,Ohta Hiroya,Ninomiya Taku,Goto Yasunori
Reference15 articles.
1. The international roadmap for devices and systems (IRDS): 2017 edition.
2. http://www.techinsights.com/NAND-flash-roadmap/
3. 3D memory: etch is the new litho;Christopher,2018
4. Critical dimension small angle X-ray scattering measurements of FinFET and 3D memory structures;Settens,2013
5. Determination of the Internal Morphology of Nanostructures Patterned by Directed Self Assembly
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Simulating HV-SEM imaging of HAR and buried features;Metrology, Inspection, and Process Control XXXVII;2023-04-27
2. Electron microscopy in semiconductor inspection;Measurement Science and Technology;2021-03-25