Author:
Yoshino Yoichi,Morishige Yukio,Watanabe Shuichi,Kyusho Yukio,Ueda Atsushi,Haneda Tutomu,Ohmiya Makoto
Cited by
4 articles.
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1. Photomask Fabrication;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
2. Mask Repair;Handbook of Photomask Manufacturing Technology;2005-04-07
3. Picosecond laser system for photomask repair with nanometer accuracy;SPIE Proceedings;2003-02-21
4. High-accuracy laser mask repair technology using ps UV solid state laser;SPIE Proceedings;2002-02-19