Advances in multilayer reflective coatings for extreme ultraviolet lithography-Reference-Cited by-同舟云学术

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Advances in multilayer reflective coatings for extreme ultraviolet lithography

Published:1999-06-25 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Folta James A.,Bajt Sasa,Barbee, Jr. Troy W.,Grabner R. Fred,Mirkarimi Paul B.,Nguyen Tai D.,Schmidt Mark A.,Spiller Eberhard A.,Walton Christopher C.,Wedowski Marco,Montcalm Claude

Publisher

SPIE

Cited by 57 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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