Contact inspection of Si nanowire with SEM voltage contrast

Author:

Hasumi Kazuhisa,Ikota Masami,Ohashi Takeyoshi,Yamaguchi Atsuko,Lorusso Gian F.,Horiguchi Naoto

Publisher

SPIE

Reference9 articles.

1. A 14 nm logic technology featuring 2nd-generation fin-FETs, air-gapped interconnects, selfaligned double patterning and a 0.0588 µm2 SRAM cell size;Natarajan,2014

2. Considerations for Ultimate CMOS Scaling

3. Gate-All-Around MOSFETs based on Vertically Stacked Horizontal Si Nanowires in a Replacement Metal Gate Process on Bulk Si Substrates;Mertens,2016

4. Contactless electrical testing of large area specimens using electron beams

5. New Voltage Contrast Imaging Method for Detection of Electrical Failures;Nozoe,2000

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