A Second Generation Focused Ion Beam Micromachining System
Author:
Affiliation:
1. AT&T Bell Laboratories (United States)
Publisher
SPIE
Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Machinability study of high speed steel for focused ion beam (FIB) milling process – An experimental investigation at micron/nano scale;Precision Engineering;2014-01
2. An accurate and efficient control over the present numerical model of depth of sputtering in focused ion beam milling;Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems;2009-03-01
3. Effects of evolving surface morphology on yield during focused ion beam milling of carbon;Applied Surface Science;2006-01
4. Focused ion beam sculpting curved shape cavities in crystalline and amorphous targets;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
5. Morphology evolution on diamond surfaces during ion sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2005-11
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