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Effects of evolving surface morphology on yield during focused ion beam milling of carbon

  • Published:2006-01 Issue:6 Volume:252 Page:2432-2444
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Adams D.P.,Mayer T.M.,Vasile M.J.,Archuleta K.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference35 articles.

1. Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films;Brundle,1992

2. Depth control of focused ion-beam milling from a numerical model of the sputter process

3. Secondary Ion Mass Spectrometry: A Practical Handbook, for Depth Profiling and Bulk Impurity Analysis;Wilson,1989

4. Real-time observation of ripple structure formation on a diamond surface under focused ion-beam bombardment

5. Patterning of diamond and amorphous carbon films using focused ion beams

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