1. Development of Surface Contamination and Cleaning: Particle deposition, Control and Cleaning;Kohli,2009
2. Particle detection using an integrated capacitance sensor
3. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems;Feldman,2015
4. Development of laser produced plasma-based EUV light source technology for HVM EUV lithography;Fujimoto,2012
5. Absorption and scattering of radiation from small particles;Boheren,1998