1. Resolution Enhancement Techniques in Optical Lithography
2. X. Ma and G. R. Arce, Computational Lithography, Wiley Series in Pure and Applied Optics, John Wiley and Sons, New York, 1 ed., 2010.
3. Optimization of stepper parameters and their influence on opc;Vallishayee,1996
4. Effective multicutline quasar illumination optimization for sram and logic;Brist,2003
5. Illuminator design for the printing of regular contact patterns