Author:
Munro Eric,Zhu Xieqing,Rouse John A.,Liu Haoning
Cited by
3 articles.
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1. Notes and References;Principles of Electron Optics;2018
2. Aberration correction for electron beam inspection, metrology, and lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008-11
3. Some advances in electron optics since CPO-5;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2004-02