Author:
Russ John C.,Dudley Bruce W.,Jones Susan K.
Cited by
7 articles.
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1. Wafer surface reconstruction from top–down scanning electron microscope images;Microelectronic Engineering;2004-08
2. Evaluating neural network reconstruction of wafer profile from electron microscopy;SPIE Proceedings;2001-04-04
3. RNN based photo-resist shape reconstruction from scanning electron microscopy;Proceedings of the IEEE-INNS-ENNS International Joint Conference on Neural Networks. IJCNN 2000. Neural Computing: New Challenges and Perspectives for the New Millennium;2000
4. Inverse scattering approach to SEM linewidth measurements;SPIE Proceedings;1999-06-14
5. Focused ion beam metrology;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11