Author:
Choi Se-Jong,Cha Han-Sun,Yoon Si-Yeul,Kim Yong-Dae,Lee Dong-Hyuk,Kim Jin-Min,Kim Jin-Su,Min Dong-Soo,Jang Pil-Jin,Chang Byung-Soo,Kwon Hyuk-Joo,Choi Boo-Yeon,Choi Sang-Soo,Jeong Soo Hong
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Photomask plasma etching: A review;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006