Author:
Bogdanski N.,Schulz Hubert,Wissen Matthias,Scheer Hella-Christin
Cited by
8 articles.
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1. Study of defect mechanisms in partly filled stamp cavities for thermal nanoimprint control;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11
2. Mechanical characterization of a piezo-operated thermal imprint system;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11
3. Potential and limitations of a T-NIL/UVL hybrid process;Microelectronic Engineering;2010-05
4. Contact angles in a thermal imprint process;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008-11
5. Challenges of residual layer minimisation in thermal nanoimprint lithography;23rd European Mask and Lithography Conference;2007-02-08