TEM calibration methods for critical dimension standards-Reference-Cited by-同舟云学术

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TEM calibration methods for critical dimension standards

Published:2007-03-16 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Orji Ndubuisi G.,Dixson Ronald G.,Garcia-Gutierrez Domingo I.,Bunday Benjamin D.,Bishop Michael,Cresswell Michael W.,Allen Richard A.,Allgair John A.

Publisher

SPIE

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Narrow Size Distribution Silver Nanoparticles as Standard Reference Material/Bhartiya Nideshak Dravay for TEM/HRTEM and Particle Size Analyzer Instruments;Recent Advances in Metrology;2022-07-28

2. Automatic Measurement of Silicon Lattice Spacings in High-Resolution Transmission Electron Microscopy Images Through 2D Discrete Fourier Transform and Inverse Discrete Fourier Transform;Nanomanufacturing and Metrology;2022-04-06

3. Transmission electron microscope calibration methods for critical dimension standards;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-10-13

4. Development and characterisation of a new line width reference material;Measurement Science and Technology;2015-10-09

5. Size measurement uncertainties of near-monodisperse, near-spherical nanoparticles using transmission electron microscopy and particle-tracking analysis;Journal of Nanoparticle Research;2014-09-12

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