Performance of a MEMS reflective wavefront sensor

Author:

Andrews Jonathan R.,Teare Scott W.,Restaino Sergio R.,Martinez Ty,Wilcox Christopher C.,Wick David V.,Cowan William D.,Spahn Olga B.,Bagwell Brett E.

Publisher

SPIE

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Testing and Standards for Qualification;MEMS Reliability;2010-09-06

2. Optimization study on the deformable mirror support structure of the hyperspectral imaging system for food detection;5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems;2010-05-13

3. Effects of layers and vias on continuous-wave laser heating and damage of surface-micromachined structures;Journal of Micro/Nanolithography, MEMS, and MOEMS;2009-10-01

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