1. Douglass, M.R. (2008) MEMS Reliability, Coming of Age. Proc. of SPIE. 6884, 688402, (eds. Hartzell, A.L. Ramesham, R.).
2. Zunino, J. III, Skelton, D. (2006) Department of Defense Need for a Micro-electromechanical Systems (MEMS) Reliability Assessment Program. Proc. of SPIE. 5716, (eds. Tanner, D., Rajeshuni Ramesham R.).
3. Merlijn van Spengen, W. (2003) MEMS reliability from a failure mechanisms prospective. Microelectronics Reliability 43, 1049–1060.
4. Tanner, D., et al. (2000) MEMS reliability in a vibration environment. IEEE IRPS, San Jose, CA, April 10–13, pp. 139–145.
5. http://www.bostonmicromachines.com/news_press_ao_toolkit.htm .