Evaluation of carbon nanotube probes in critical dimension atomic force microscopes-Reference-Cited by-同舟云学术

Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

Published:2016-08-26 Issue:3 Volume:15 Page:034005
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Choi Jinho¹,Park Byong Chon²,Ahn Sang Jung²,Kim Dal-Hyun²,Lyou Joon³,Dixson Ronald G.⁴,Orji Ndubuisi G.⁴,Fu Joseph⁴,Vorburger Theodore V.⁴

Affiliation:

1. Korea Research Institute of Standards and Science, 267 Gajeong-Ro, Yuseong-Gu, Daejeon 305-345, Republic of KoreabChungnam National University, 99 Daehak-Ro, Yuseong-Gu, Daejeon 34134, Republic of Korea

2. Korea Research Institute of Standards and Science, 267 Gajeong-Ro, Yuseong-Gu, Daejeon 305-345, Republic of Korea

3. Chungnam National University, 99 Daehak-Ro, Yuseong-Gu, Daejeon 34134, Republic of Korea

4. National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899-8212, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. Review of reference metrology for nanotechnology: significance, challenges, and solutions

2. Metrology needs for through-silicon via fabrication

3. Three-dimensional measurement by tilting and moving objective lens in CD-SEM

4. New technique to reconstruct effective 3D profile from tilt images of CD-SEM

5. Scatterometry for CD measurements of etched structures

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