Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylate-Reference-Cited by-同舟云学术

Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylate

Published:2016-10-17 Issue:4 Volume:15 Page:044501
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Ebraert Evert¹,Gökçe Berkcan¹,Van Vlierberghe Sandra²,Vervaeke Michael¹,Meyer Pascal³,Guttmann Markus³,Dubruel Peter⁴,Thienpont Hugo²,Van Erps Jürgen¹

Affiliation:

1. Vrije Universiteit Brussel, Brussels Photonics Team, Department of Applied Physics and Photonics, Pleinlaan 2, B-1050 Brussels, Belgium

2. Vrije Universiteit Brussel, Brussels Photonics Team, Department of Applied Physics and Photonics, Pleinlaan 2, B-1050 Brussels, BelgiumbGhent University (UGent), Polymer Chemistry and Biomaterials Research Group (PBM), Krijgslaan 281 S4 Bis, 9000 Ghent, Belgium

3. Karlsruhe Institute of Technology, Institute for Microstructure Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

4. Ghent University (UGent), Polymer Chemistry and Biomaterials Research Group (PBM), Krijgslaan 281 S4 Bis, 9000 Ghent, Belgium

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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4. Design and prototyping of self-centering optical single-mode fiber alignment structures

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