Deep proton writing of high aspect ratio SU-8 micro-pillars on glass
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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1. Fabrication of High-Precision Micro-Opto-Mechanical Components through Deep Proton Writing;Optical Design and Fabrication 2017 (Freeform, IODC, OFT);2017
2. Prototyping and Replication of Polymer Freeform Optical Components;Optical Design and Fabrication 2017 (Freeform, IODC, OFT);2017
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