Multifractal analysis of line-edge roughness-Reference-Cited by-同舟云学术

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Multifractal analysis of line-edge roughness

Published:2018-03-13 Issue: Volume: Page:
ISSN:
Container-title:Metrology, Inspection, and Process Control for Microlithography XXXII
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Author:

Papavieros George,Lorusso Gian F.,Rutigliani Vito,Gogolides Evangelos,Constantoudis Vassilios,van Roey Frieda

Publisher

SPIE

Reference25 articles.

1. Surfaces and their Measurement;Whitehouse,2002

2. Characterization of Areal Surface Texture;Leach,2013

3. Invariante Variationsprobleme;Noether,1918

4. Physics from Symmetry

5. CD-SEM measurement line-edge roughness test patterns for 193-nm technology;Bunday,2003

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quantitative characterization of hierarchical multiscale surfaces of micro and nanostructured materials;Nanotechnology;2023-07-19

2. Line edge roughness metrology: recent challenges and advances toward more complete and accurate measurements;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-10-13

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