Laser-plasma SXR/EUV sources: adjustment of radiation parameters for specific applications
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SPIE
Reference29 articles.
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1. A desktop extreme ultraviolet microscope based on a compact laser-plasma light source;Applied Physics B;2016-12-24
2. A stand-alone compact EUV microscope based on gas-puff target source;Journal of Microscopy;2016-10-21
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